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Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions

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{| border="1" cellspacing="1" cellpadding="1" align="middle"
{| border="1" cellspacing="1" cellpadding="1" align="middle"
![[image:SEM_PDMS_1.jpg|300x300px|thumb|left|
![[image:SEM_PDMS_1.jpg|300x300px|thumb|left|
  Bird View. Dark area is Silicon. Bright area is Silicon Dioxide. The edges are nicely defined, though corrugated on the 100 nm scale.
  SEM showing the replicated features in PDMS.
]]
]]
![[image:SEM_PDMS_2.jpg|300x300px|thumb|left|
![[image:SEM_PDMS_2.jpg|300x300px|thumb|left|
  Bird View. Dark area is Silicon. Bright area is Silicon Dioxide. The edges are nicely defined, though corrugated on the 100 nm scale.
  SEM showing the replicated features in PDMS.
]]
]]
![[image:SEM_PDMS_3.jpg|300x300px|thumb|left|
![[image:SEM_PDMS_3.jpg|300x300px|thumb|left|
  Close up. Bird View. Dark area is Silicon. Bright area is Silicon Dioxide. Residues of the SiO2 etching are apperent on top of the SiO2, i.e. particles a few nanometers in diameter. Most probably it is sputtered and redopsited Silicon Dioxide, but not confirmed. Attempts to remove them in 7-Up or HCl failed.
  Close up. SEM showing a replicated feature in PDMS.
]]
]]
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{| border="1" cellspacing="1" cellpadding="1" align="middle"
{| border="1" cellspacing="1" cellpadding="1" align="middle"
![[image:SEM_PDMS_4.jpg|300x300px|thumb|left|
![[image:SEM_PDMS_4.jpg|300x300px|thumb|left|
  Bird View. Dark area is Silicon. Bright area is Silicon Dioxide. The edges are nicely defined, though corrugated on the 100 nm scale.
  SEM showing a replicated feature in PDMS.
]]
]]
![[image:SEM_PDMS_5.jpg|300x300px|thumb|left|
![[image:SEM_PDMS_5.jpg|300x300px|thumb|left|
  Close up. Bird View. Dark area is Silicon. Bright area is Silicon Dioxide. Residues of the SiO2 etching are apperent on top of the SiO2, i.e. particles a few nanometers in diameter. Most probably it is sputtered and redopsited Silicon Dioxide, but not confirmed. Attempts to remove them in 7-Up or HCl failed.
  SEM showing a replicated feature in PDMS.
]]
]]
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