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Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions

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{| border="1" cellspacing="1" cellpadding="1" align="middle"
{| border="1" cellspacing="1" cellpadding="1" align="middle"
![[image:StackedSlices_2.jpg|300x300px|thumb|left|
![[image:StackedSlices_2.jpg|300x300px|thumb|left|
  Photograph of a multitude of silicon slices stacked and fixed with a purpose made clamp made of Aluminum. The c
  Photograph of a multitude of silicon slices stacked and fixed with a purpose made clamp made of Aluminum.
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![[image:StackedSlices_3.jpg|300x300px|thumb|left|
![[image:StackedSlices_3.jpg|300x300px|thumb|left|
  In order to be able to fill the
  Close up. The DRIE etched cavities are visible.
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![[image:StackedSlicesWithFrame.jpg|300x300px|thumb|left|
![[image:StackedSlicesWithFrame.jpg|300x300px|thumb|left|
  In order to be able to fill the  
  In order to be able to fill the cavities with PDMS and obtain a proper sample a fixture needs to be placed on top of the features. The gap between clamp and fixture needs to be carefully sealed with e.g. sticky tape.
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