Specific Process Knowledge/Characterization/Sample preparation

Replica Molding for Sample Inspection

Negative replicas of micro- or nanostructures can be obtained by casting with PDMS. This can facilitate the characterization of the three dimensional shape, the texture, or the roughness of a given sample. It may circumvent the inabilities of probes (AFM tip, stylus) to approach a surface of e.g. a deep and narrow cavity. It may also circumvent limitations of the optical profiler regarding the maximum detectable slope or the sensitivity of the CCD when measuring strongly tapered or deep cavities. PDMS is a common material in microfabrication and has unique properties that allow replicating features in the single nanometer range [1].

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A simplified list of necessary steps

Step	Task	Aim	Methods
1	Sample preparation	A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.	Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
2	Anti-stiction coating	A sample to which PDMS does not adhere upon casting.	E.g. MVD -> FDTS layer (comply to cleanroom and machine rules)
3	Sample preparation	A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.	Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
4	Sample preparation	A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.	Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
5	Sample preparation	A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.	Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
6	Sample preparation	A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.	Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
7	Sample preparation	A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.	Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
8	Sample preparation	A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.	Some parts from the mechanical workshop, etc. Do not forget poper cleaning.
9	Sample preparation	A mold containing the sample that is sufficiently sealed to allow holding the viscous polymer.	Some parts from the mechanical workshop, etc. Do not forget poper cleaning.