Specific Process Knowledge/Characterization/Sample preparation: Difference between revisions

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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
==An overview of the performance of the AFM: Nanoman==
{| border="2" cellspacing="0" cellpadding="2"
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
|style="background:WhiteSmoke; color:black"|<b>Nanoman</b>
|-
!style="background:silver; color:black;" align="left"|Purpose
|style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime
|style="background:WhiteSmoke; color:black"|
*Surface roughness measurement
*Step/structure hight measurement
*Surface image
|-
!style="background:silver; color:black" align="left"|Performance
|style="background:LightGrey; color:black"|Scan range xy
|style="background:WhiteSmoke; color:black"|Up to 90 µm square
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Scan range z
|style="background:WhiteSmoke; color:black"| 1 µm (can go up to 6µm with special settings)
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Resolution xy
|style="background:WhiteSmoke; color:black"|Down to 1.4 nm - accuracy better than 2%
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Resolution z
|style="background:WhiteSmoke; color:black"|<1 Å - accuracy better than 2%
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W
|style="background:WhiteSmoke; color:black"|~1 for our standard probe. Can be improved to about 10 with the right probe
|-
!style="background:silver; color:black" align="left"|Hardware settings
|style="background:LightGrey; color:black"|Tip radius of curvature
|style="background:WhiteSmoke; color:black"|Standard probe: <12 nm
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Standard Cantilevers/tips
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-Tap300Al-G.html Tap300Al-G]
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Super Sharp Si Cantilever/tip
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-SSS-NCHR.html SSS-NCHR]
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|High Aspect Ratio Cantilever/tip
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/AFM-Probe-AR5-NCHR.html AR5-NCHR]
|-
|style="background:silver; color:black"|
|style="background:LightGrey; color:black"|Cantilevers/tips vendor
|style="background:WhiteSmoke; color:black"|[http://www.nanoandmore.com/home.php www.nanoandmore.com]
|-
|-
!style="background:silver; color:black" align="left"|Substrates
|style="background:LightGrey; color:black"|Substrate size
|style="background:WhiteSmoke; color:black"|Up to 6"
|-
|style="background:silver; color:black"|
| style="background:LightGrey; color:black"|Substrate material allowed
|style="background:WhiteSmoke; color:black"|In principle all materials
|-
|}
<br clear="all" />

Revision as of 17:30, 12 May 2015

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THIS PAGE IS UNDER CONSTRUCTION

An overview of the performance of the AFM: Nanoman

Equipment Nanoman
Purpose Topografic measurement in the nanometer and and sub-micrometer regime
  • Surface roughness measurement
  • Step/structure hight measurement
  • Surface image
Performance Scan range xy Up to 90 µm square
Scan range z 1 µm (can go up to 6µm with special settings)
Resolution xy Down to 1.4 nm - accuracy better than 2%
Resolution z <1 Å - accuracy better than 2%
Max. scan depth as a function of trench width W ~1 for our standard probe. Can be improved to about 10 with the right probe
Hardware settings Tip radius of curvature Standard probe: <12 nm
Standard Cantilevers/tips Tap300Al-G
Super Sharp Si Cantilever/tip SSS-NCHR
High Aspect Ratio Cantilever/tip AR5-NCHR
Cantilevers/tips vendor www.nanoandmore.com
Substrates Substrate size Up to 6"
Substrate material allowed In principle all materials


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