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==HMDS priming==
==HMDS priming==
The standard HMDS priming process has been developed to mimic the behavior of the IMTEC Star2000 HMDS oven.
The standard HMDS priming process has been developed to mimic the behavior of the IMTEC Star2000 HMDS oven.
It produces a contact angle of 81-82° on an oxidized silicon surface. General information on HMDS priming can be found  [[Specific_Process_Knowledge/Lithography/Coaters/Spin Track 1 + 2 processing#HMDS priming|here]].
It produces a contact angle of 81-82° on an oxidized silicon surface. General information on HMDS priming can be found  [[Specific_Process_Knowledge/Lithography/Coaters/Spin_Coater:_Gamma_UV_processing#HMDS priming|here]].


''Flow names, process parameters, and test results:''
''Flow names, process parameters, and test results:''
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