Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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''Flow names, process parameters, and test results:'' | ''Flow names, process parameters, and test results:'' | ||
*''' | *'''HMDS fast''' | ||
Process parameters: 10s contact bake, 30s vacuum bake, 72s HMDS priming, 5s cooling. | Process parameters: 10s contact bake, 30s vacuum bake, 72s HMDS priming, 5s cooling. | ||
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|taran | |taran | ||
|average of three measurements on one sample | |average of three measurements on one sample | ||
|} | |||
*'''HMDS Standard''' | |||
Process parameters: 10s contact bake, 30s vacuum bake, 72s HMDS priming, 5s cooling. | |||
Test results: | |||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
!Substrate | |||
!Contact angle | |||
!Test date | |||
!Tester initials | |||
!Comments | |||
|- | |||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| | |110 nm oxide | ||
| | |82.0° | ||
| | |7/5 2013 | ||
|taran | |taran | ||
| | |average of three measurements on one sample | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| | |Si with native oxide | ||
| | |73.3° | ||
| | |7/5 2013 | ||
|taran | |taran | ||
| | |average of nine measurements (three measurements on three different samples) | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| | |Borofloat (glass) | ||
| | |65.6° | ||
| | |7/5 2013 | ||
|taran | |taran | ||
| | |average of three measurements on one sample | ||
|} | |} | ||