Specific Process Knowledge/Back-end processing/Disco Saw

Disco Automatic dicing saw, model DAD321

Dicer positioned on 1. floor bldg 346 room

The dicer feature versatile processing capabilities, compact designs, and high precision and reliability. Users perform workpiece loading, alignment, and unloading manually.

The dicer at DANCHIP is placed in room ?? on the first floor in bldg. 346. Please notice that this is not a cleanroom and that the dicingproces is very dirty. Think about how to clean your samples if you want to bring them back in the cleanroom.

The dicer can handle up to 6” wafers and 160x160 mm square samples and has a 192 mm cutting range.

A rough overview of the performance Disco DAD321 Dicer

Purpose	Equipment for dicing out samples.	Pure Silicon samples Silicon bonded to Silicon Silicon bonded to Pyrex/Borofloat Pyrex/Borofloat
Performance	Scan range xy	Line scan x: 50 µm to 200 mm
.	Scan range z	50 Å to 262 µm
.	Resolution xy	down to 0.067 µm
.	Resolution z	1Å, 10Å or 20Å
.	Max. scan depth as a function of trench width W	1.2(W[µm]-5µm)
Hardware settings	Tip radius	5 µm 45o cone
Substrates	Substrate size	up to 8"
.	Substrate material allowed	In principle all materials

Comparing dicing parameters for different materials

	FilmTek 4000	Ellipsometer
Method	Reflection	Ellipsometry
General description	Thin films up to 250 µm, Especially good for thick thin films and for wafer mapping	Good for very thin films down to a few Å
Film thickness range	<250 µm (for silicon oxides > ~75nm)	20 Å to ~2µm (for silicon oxide)
Film thickness accuracy	Very dependent of how good the model fits (if the fit is good it could be within 1% for a single layer)	Very dependent of how good the model fits.
Index range	not any limits	not any limits
Index accuracy	not known	not known
Wavelength range	400-1000 nm	300-950 nm
What kind of thin films can be measured	Any film that is transparent to the light in the given wavelength range ex: Silicon Oxide Silicon nitride PolySilicon Photoresists SU8 Other polymers Very thin layers of metals (<20 nm) and many more	Any film that is transparent to the light in the given wavelength range ex: Silicon Oxide Silicon nitride Very thin layers of PolySilicon Photoresists SU8 Other polymers Very thin layers of metals (<20 nm) and many more

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