Jump to content

Specific Process Knowledge/Lithography/Coaters: Difference between revisions

← Older editNewer edit →
VisualWikitext
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Line 445: Line 445:
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*HMDS priming
*HMDS priming
*Spin coating and soft baking of PGMEA based AZ resists
*Spin coating of PGMEA based AZ resists
*Soft baking
|-
|-
!style="background:silver; color:black;" align="center" width="60"|Resist  
!style="background:silver; color:black;" align="center" width="60"|Resist  
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Coaters"