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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
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* 100cc syringe dispense
* 100cc syringe dispense
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!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Performance
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
|style="background:LightGrey; color:black"|HMDS contact angle
|style="background:WhiteSmoke; color:black" align="center"|
* 65 - 85°
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|style="background:LightGrey; color:black"|Coating thickness
|style="background:LightGrey; color:black"|Coating thickness
|style="background:WhiteSmoke; color:black" align="center"|
|style="background:WhiteSmoke; color:black" align="center"|
* AZ MiR 701 1.5-4 µm
* AZ nLOF 2020 1.5-5 µm
* AZ 5214E 1.5-5 µm
* AZ 5214E 1.5-5 µm
* AZ 4562 5-15 µm
* AZ 4562 5-15 µm
* AZ MiR 701 1.5-4 µm
* AZ nLOF 2020 1.5-5 µm
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!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameters
!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Process parameters
|style="background:LightGrey; color:black"|Priming temperature
|style="background:WhiteSmoke; color:black" align="center"|
25 - 120 °C
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|style="background:LightGrey; color:black"|Spin speed
|style="background:LightGrey; color:black"|Spin speed
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
|style="background:WhiteSmoke; color:black" align="center"|
10 - 7000 rpm
10 - 7000 rpm
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|style="background:LightGrey; color:black"|Spin acceleration
|style="background:LightGrey; color:black"|Spin acceleration
|style="background:WhiteSmoke; color:black" align="center" colspan="2"|
|style="background:WhiteSmoke; color:black" align="center"|
10 - 10000 rpm/s
10 - 10000 rpm/s
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|style="background:LightGrey; color:black"|Hotplate temperature
|style="background:LightGrey; color:black"|Hotplate temperature
|style="background:WhiteSmoke; color:black" align="center"|
|style="background:WhiteSmoke; color:black" align="center"|
20 - 200 °C
25 - 200 °C
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|style="background:LightGrey; color:black"|Cool plate temperature
|style="background:LightGrey; color:black"|Cool plate temperature
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