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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Line 472: Line 472:
|style="background:LightGrey; color:black"|Coating thickness
|style="background:LightGrey; color:black"|Coating thickness
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|style="background:WhiteSmoke; color:black" align="center"|
* SU-8 resits 0.1-100+ µm
* SU-8 resits 0.1-200+ µm
* AZ 5214E 1.5-3 µm
* AZ 5214E 1.5-3 µm
* AZ 4562 8-15 µm
* AZ 4562 8-15 µm
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