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Specific Process Knowledge/Thin Film deposition/ALD/TiO2 deposition using ALD: Difference between revisions

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<gallery caption="Aluminium oxide thickness as function of number of cycles" widths="220px" heights="220px" perrow="5">
<gallery caption="Aluminium oxide thickness as function of number of cycles" widths="220px" heights="220px" perrow="5">
image:ALD_TiO2_grow_rate_150C.tif| Temperature 150 <sup>o</sup>C.
image:ALD_TiO2_grow_rate_150C.jpg| Temperature 150 <sup>o</sup>C.
image:ALD Al2O3 grow rate 200C.jpg| Temperature 200 <sup>o</sup>C.
image:ALD Al2O3 grow rate 200C.jpg| Temperature 200 <sup>o</sup>C.
image:ALD Al2O3 grow rate 250C.jpg| Temperature 250 <sup>o</sup>C.
image:ALD Al2O3 grow rate 250C.jpg| Temperature 250 <sup>o</sup>C.