Specific Process Knowledge/Thin Film deposition/ALD/TiO2 deposition using ALD: Difference between revisions
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<gallery caption="Aluminium oxide thickness as function of number of cycles" widths="220px" heights="220px" perrow="5"> | <gallery caption="Aluminium oxide thickness as function of number of cycles" widths="220px" heights="220px" perrow="5"> | ||
image:ALD_TiO2_grow_rate_150C. | image:ALD_TiO2_grow_rate_150C.jpg| Temperature 150 <sup>o</sup>C. | ||
image:ALD Al2O3 grow rate 200C.jpg| Temperature 200 <sup>o</sup>C. | image:ALD Al2O3 grow rate 200C.jpg| Temperature 200 <sup>o</sup>C. | ||
image:ALD Al2O3 grow rate 250C.jpg| Temperature 250 <sup>o</sup>C. | image:ALD Al2O3 grow rate 250C.jpg| Temperature 250 <sup>o</sup>C. | ||