Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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|| Non destructive method: X-rays are generated when the primary beam impinges on the sample. The elemental analysis is possible because the energy of these | || Non destructive method: X-rays are generated when the primary beam impinges on the sample. The elemental analysis is possible because the energy of these X-rays is characteristic of the element they emitted from. | ||
|| Destructive method: A beam of high energy heavy ions (caesium or oxygen) sputters off surface atoms that are subsequently measured with a mass spectrometer. | || Destructive method: A beam of high energy heavy ions (caesium or oxygen) sputters off surface atoms that are subsequently measured with a mass spectrometer. | ||
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