Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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In this experiment, several writing fields were stitched together. Vernier marks on the edges of one writing field (1 mm x 1 mm) shows the field stitching. | In this experiment, several writing fields were stitched together. Vernier marks on the edges of one writing field (1 mm x 1 mm) shows the field stitching. | ||
[[File:FieldToField.png| | [[File:FieldToField.png|700px]] | ||
== Layer to layer stitching == | == Layer to layer stitching == | ||