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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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Line 98: Line 98:
|style="background:LightGrey; color:black"|Spindle speed
|style="background:LightGrey; color:black"|Spindle speed
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*100-5000 rpm
*100 - 5000 rpm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*100-5000 rpm
*100-5000 rpm
Line 104: Line 104:
*10 - 9990 rpm
*10 - 9990 rpm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*?? rpm
*100 - 5000 rpm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*100-5000 rpm
*100 - 5000 rpm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*100-7000 rpm
*100 - 7000 rpm
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
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