Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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== Layer to layer stitching == | == Layer to layer stitching == | ||
In this experiment, global marks and chip marks were exposoed along with first set of vernier marks in layer 1 exposed in appr 170 nm CSAR. This layer was developed, metalized and lift-off performed with 4 second ultrasonic. A new layer of resist (appr 170 nm CSAR) was spin coated onto the wafer and layer 2 aligned to the two gloabl marks and 4 chip marks. Layer 2 was developed, metalized and lift-off performed with 4 second ultrasonic. The final pattern SEM inspected in Zeiss Supra 60VP. | |||
[[File:LayerToLayer1.png|1000px]][[File:LayerToLayer2.png|1000px]] | |||
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