Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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|'''Chemical solution''' | |'''Chemical solution''' | ||
|HF:NH<math>_4</math>F | |HF:NH<math>_4</math>F | ||
| | |NH<math>_3</math>OH:H<math>_2</math>O<math>2</math>:H<math>_2</math>O - 1:1:5 | ||
|- | |- | ||
|'''Process temperature''' | |'''Process temperature''' | ||