Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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==Etching of Titanium== | ==Etching of Titanium== | ||
Etching of Titanium is done wet at Danchip | Etching of Titanium is done wet at Danchip. We have two solutions for titanium etching: | ||
# BHF | # BHF | ||
# Cold RCA1 (as stripper) | # Cold RCA1 (as stripper) | ||
Do it by making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom 2. | |||