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Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions

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==Etching of Titanium==
==Etching of Titanium==
Etching of Titanium is done wet at Danchip making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4 or in the PP-etch bath in the fume hood in cleanroom 2. We have ?:
Etching of Titanium is done wet at Danchip. We have two solutions for titanium etching:
 
 
# BHF  
# BHF  
# Cold RCA1 (as stripper)
# Cold RCA1 (as stripper)
Do it by making your own set up in a beaker in a fume hood - preferably in cleanroom 2 or 4. BHF etching can also take place in the PP-etch bath in the fume hood in cleanroom 2.