Specific Process Knowledge/Thermal Process/Dope with Boron: Difference between revisions
| Line 5: | Line 5: | ||
The depth profile depends of the process time. | The depth profile depends of the process time. | ||
<gallery caption="Boron profiles" widths="200px" heights="200px" perrow="3"> | <gallery caption="Boron profiles from SIMS " widths="200px" heights="200px" perrow="3"> | ||
image:borprofil_1tim.jpg|1 | image:borprofil_1tim.jpg|1 hour | ||
image:borprofil_6tim.jpg|6 | image:borprofil_6tim.jpg|6 hours | ||
image:borprofil_16tim.jpg|16 | image:borprofil_16tim.jpg|16 hours | ||
</gallery> | </gallery> | ||