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|PECVD | |PECVD | ||
|Si<sub>3</sub>N<sub>4</sub>, SiO<sub>2</sub>, PBSG | |Si<sub>3</sub>N<sub>4</sub>, SiO<sub>2</sub>, PBSG | ||
|- | |||
|MVD | |||
|FDTS | |||
|- | |- | ||
|Electroplating | |Electroplating | ||