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Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide: Difference between revisions

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{| border="2" cellspacing="2" cellpadding="3"
{| border="2" cellspacing="2" cellpadding="3"
|-style="background:Black; color:White"
!Results  
!Results  
!Test on wafer with 50% load (Travka 50), by BGHE @danchip
!Test on wafer with 50% load (Travka 50), by BGHE @danchip