Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide: Difference between revisions
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{| border="2" cellspacing="2" cellpadding="3" | {| border="2" cellspacing="2" cellpadding="3" | ||
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!Results | !Results | ||
!Test on wafer with 50% load (Travka 50), by BGHE @danchip | !Test on wafer with 50% load (Travka 50), by BGHE @danchip | ||