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Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
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*13:30
*13:30
   
   
To use the e-beam writer, book the machine via LabManager, '''note the number and type of substrate as well as the condition file to be used in the 'Public Comment:' field in LabManager'''. Mount your substrate in the cassette and pre-align (if necessary) before the loading session preceding your booking, and show up at the time your cassette is loaded.  
To use the e-beam writer, book the machine via LabManager, '''note the number and type of substrate as well as the condition file to be used in the 'Public Comment:' field in LabManager'''. Mount your substrate in the cassette (and pre-align if necessary) before the loading session preceding your booking, and show up at the time your cassette is loaded.  


After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader.
After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader.
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