Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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To use the e-beam writer, book the machine via LabManager, '''note number and type of substrate and which condition file to use in the | To use the e-beam writer, book the machine via LabManager, '''note number and type of substrate and which condition file to use in the 'Public Comment:' field in LabManager'''. Show up to the loading session before your exposure to mount your substrate and pre-align if necessary. | ||
After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader. | After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader. | ||