Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
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{| {{table}} border="2" cellspacing="0" cellpadding="8" | {| {{table}} border="2" cellspacing="0" cellpadding="8" | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''''' | | valign="top" align="center" style="background:#f0f0f0;"|'''''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''A1 Boron drive-in''' | | valign="top" align="center" style="background:#f0f0f0;"|'''A1 <br /> Boron drive-in''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''A3 Phosphorous drive-in''' | | valign="top" align="center" style="background:#f0f0f0;"|'''A3 <br />Phosphorous drive-in''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''C1 Gate oxide''' | | valign="top" align="center" style="background:#f0f0f0;"|'''C1 <br />Gate oxide''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''C2 Anneal oxide''' | | valign="top" align="center" style="background:#f0f0f0;"|'''C2 <br />Anneal oxide''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''C3 Anneal bond''' | | valign="top" align="center" style="background:#f0f0f0;"|'''C3 <br />Anneal bond''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''C4 Anneal aluminium''' | | valign="top" align="center" style="background:#f0f0f0;"|'''C4 <br />Anneal aluminium''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''Nobel furnace''' | | valign="top" align="center" style="background:#f0f0f0;"|'''Nobel furnace''' | ||
| valign="top" align="center" style="background:#f0f0f0;"|'''RTP''' | | valign="top" align="center" style="background:#f0f0f0;"|'''RTP''' | ||