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* [http://www.cleanroom.byu.edu/OxideThickCalc.phtml Know time - calculate oxide thickness]
* [http://www.cleanroom.byu.edu/OxideThickCalc.phtml Know time - calculate oxide thickness]
===Deal-Grove parameters===
The following table contains linear and parabolic parameters for use in the Deal-Grove model for thermal oxidation. The parameters are obtained a least squares fit to data available in the furnace logbooks. Information on wafer orientation and doping concentration, which is not available in the logbooks, has not been included in calculating the parameters.
{| class="wikitable"
!
! colspan="3" style="text-align: center;" | Anneal Oxide
! colspan="3" style="text-align: center;" | Anneal Bond
! colspan="3" style="text-align: center;" | Boron Drive-in
! colspan="3" style="text-align: center;" | Gate Oxide
! colspan="3" style="text-align: center;" | Phosphor Drive-in
|-
| style="text-align: center;" | Recipe
| style="text-align: center;" | B [µm2/h]
| style="text-align: center;" | B/A [µm/h]
| RMSE [nm]
| style="text-align: center;" | B [µm2/h]
| style="text-align: center;" | B/A [µm/h]
| style="text-align: center;" | RMSE [nm]
| style="text-align: center;" | B [µm2/h]
| style="text-align: center;" | B/A [µm/h]
| RMSE [nm]
| style="text-align: center;" | B [µm2/h]
| style="text-align: center;" | B/A [µm/h]
| RMSE [nm]
| style="text-align: center;" | B [µm2/h]
| style="text-align: center;" | B/A [µm/h]
| RMSE [nm]
|-
| DRY900
| style="text-align: center;" | 0.000408
| style="text-align: center;" | 0.107
| style="text-align: center;" | Too little data
| style="text-align: center;" | 0.0660
| style="text-align: center;" | 0.272
| style="text-align: center;" | 31
| style="text-align: center;" | 0.000390
| style="text-align: center;" | 0.154
| style="text-align: center;" | Too little data
| style="text-align: center;" | 0.0028
| style="text-align: center;" | 0.079
| style="text-align: center;" | 4 (limited data)
| style="text-align: center;" | 0.0507
| style="text-align: center;" | 0.884
| style="text-align: center;" | Too little data
|-
| DRY1000
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.465
| style="text-align: center;" | 0.838
| style="text-align: center;" | 20
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.641
| style="text-align: center;" | 1.45
| style="text-align: center;" | 41
|-
| DRY1050
| style="text-align: center;" | 0.0111
| style="text-align: center;" | 0.526
| style="text-align: center;" | 27
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.0129
| style="text-align: center;" | 0.330
| style="text-align: center;" | 8
| style="text-align: center;" | 0.022
| style="text-align: center;" | 0.505
| style="text-align: center;" | 3 (limited data)
| style="text-align: center;" | 0.0134
| style="text-align: center;" | 0.362
| style="text-align: center;" | 6
|-
| DRY1100
| style="text-align: center;" | 0.020
| style="text-align: center;" | 0.930
| style="text-align: center;" | 10
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.0212
| style="text-align: center;" | 0.736
| style="text-align: center;" | 23
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.0313
| style="text-align: center;" | 0.553
| style="text-align: center;" | 14
|-
| WET950
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" |
| style="text-align: center;" | -
| style="text-align: center;" | 0.0716
| style="text-align: center;" | 1.25
| style="text-align: center;" | 12
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.110
| style="text-align: center;" | 1.17
| style="text-align: center;" | 11
|-
| WET1000
| style="text-align: center;" | 0.192
| style="text-align: center;" | 1.54
| style="text-align: center;" | 44
| style="text-align: center;" | -
| style="text-align: center;" |
| style="text-align: center;" | -
| style="text-align: center;" | 0.192
| style="text-align: center;" | 1.80
| style="text-align: center;" | 29
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.195
| style="text-align: center;" | 2.49
| style="text-align: center;" | 22
|-
| WET1050
| style="text-align: center;" | 0.487
| style="text-align: center;" | 0.965
| style="text-align: center;" | 29
| style="text-align: center;" | 0.477
| style="text-align: center;" | 0.899
| style="text-align: center;" | Too little data
| style="text-align: center;" | 0.455
| style="text-align: center;" | 1.33
| style="text-align: center;" | 16
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.448
| style="text-align: center;" | 1.73
| style="text-align: center;" | 12
|-
| WET1100
| style="text-align: center;" | 0.580
| style="text-align: center;" | 1.43
| style="text-align: center;" | 8
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.519
| style="text-align: center;" | 1.186
| style="text-align: center;" | 3
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | -
| style="text-align: center;" | 0.403
| style="text-align: center;" | 9.05
| style="text-align: center;" | 7
|}


===Wet Oxidation on <100>===
===Wet Oxidation on <100>===
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