Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/PrD01: Difference between revisions
Appearance
Created page with " {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;" |+ '''Process runs''' |- ! rowspan="2" width="40"| Date ! colspan="4" width="120"| Substrate Informat..." |
No edit summary |
||
| Line 27: | Line 27: | ||
! New showerhead | ! New showerhead | ||
| | | | ||
<gallery> | |||
Image:S004691-04.jpg | |||
Image:S004691-05.jpg | |||
Image:S004691-06.jpg | |||
Image:S004691-07.jpg | |||
Image:S004691-08.jpg | |||
Image:S004691-01.jpg | |||
Image:S004691-02.jpg | |||
Image:S004691-03.jpg | |||
</gallery> | |||
|- | |- | ||
|} | |} | ||