Specific Process Knowledge/Lithography/CSAR: Difference between revisions
| Line 416: | Line 416: | ||
|Characterization | |Characterization | ||
|Zeiss SEM Supra 60VP, D-3 | |Zeiss SEM Supra 60VP, D-3 | ||
|'''Acc voltage:''' 3 kV, | |'''Acc voltage:''' 3 kV, '''WD:''' < 4mm, <br />conducting tape close to pattern (29-08-2014 TIGRE) | ||
|'''Acc voltage:''' 3 kV, | |'''Acc voltage:''' 3 kV, '''WD:''' < 4mm, <br />conducting tape close to pattern (09-07-2014 TIGRE) | ||
|'''Acc voltage:''' 2 kV, | |'''Acc voltage:''' 2 kV, '''WD:''' < 4mm, <br />conducting tape close to pattern (06-06-2014 TIGRE) | ||
|- | |- | ||
|} | |} | ||