Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Sputter Coat | |Sputter Coat (please contact [mailto:ramona.mateiu@cen.dtu.dk Ramona Valentina Mateiu] for information ) | ||
|Cressington 208HR, DTU CEN | |||
|3-5 nm Pt, sputtering, (29-08-2014 TIGRE) | |3-5 nm Pt, sputtering, (29-08-2014 TIGRE) | ||
|3-5 nm Pt, sputtering (09-07-2014 TIGRE) | |3-5 nm Pt, sputtering (09-07-2014 TIGRE) | ||