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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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DCH-Employees-701
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! rowspan="12" align="center"| Recipe
! rowspan="13" align="center"| Recipe
| rowspan="4"| Deposition step
| rowspan="4"| Deposition step
|Time
|Time
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|Platen temperature
|Platen temperature
|20 °C
|20 °C
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