Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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! rowspan="2" align="center"| Etch rates | ! rowspan="2" align="center"| Etch rates | ||
| Si | | Si | ||
| 500 nm lines: ~500 nm/min | | | ||
190 nm lines: ~500 nm/min | 500 nm lines: ~500 nm/min <br> | ||
190 nm lines: ~500 nm/min <br> | |||
102 nm lines: ~490 nm/min | 102 nm lines: ~490 nm/min <br> | ||
61 nm lines: ~440 nm/min | 61 nm lines: ~440 nm/min | ||
|- | |- | ||