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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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| Gasses
| Gasses
| C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<sub>6</sub> 38 sccm
| C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<sub>6</sub> 38 sccm
|rowspan="7" |  
|rowspan="7" | [[File:617817 HD-4_11.tif|300px]] [[File:617817 HD-4_14.tif|300px]] [[File:617817 HD-4_16.tif|300px]] [[File:617817 HD-4_18.tif|300px]]
|-
|-
| Pressure
| Pressure
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