Specific Process Knowledge/Lithography/CSAR: Difference between revisions
Appearance
| Line 736: | Line 736: | ||
40 W Platen Power | 40 W Platen Power | ||
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| | |Platen temperature | ||
| -20 | | -20 °C | ||
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| Line 736: | Line 736: | ||
40 W Platen Power | 40 W Platen Power | ||
|- | |- | ||
| | |Platen temperature | ||
| -20 | | -20 °C | ||
|- | |- | ||