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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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DCH-Employees-701
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Tigre (talk | contribs)
DCH-Employees-701
2,257 edits
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! rowspan="5" align="center"| Recipe
! rowspan="4" align="center"| Recipe
| Gasses
| Gasses
| C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<sub>6</sub> 38 sccm
| C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<sub>6</sub> 38 sccm
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