Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions

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It measures with an accurracy within a few µm.
It measures with an accurracy within a few µm.
The ragnge is from a few µm up to 5mm  
The range is from a few µm up to 5mm  
Measure the wafer in the box next to the meter.If ok other wafers can be measured.
Measure the wafer in the box next to the meter.If this is ok, then other wafers can be measured.
There is a calibration device by the DEKTAK.
There is a calibration device by the DEKTAK.
It is calibrated at 750µm
It is calibrated at 750µm

Revision as of 11:01, 6 February 2008

This is a micrometer-screw.

The Thickness measurer in Cleanroom 3

It measures with an accurracy within a few µm. The range is from a few µm up to 5mm Measure the wafer in the box next to the meter.If this is ok, then other wafers can be measured. There is a calibration device by the DEKTAK. It is calibrated at 750µm