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== Contrast Curves ==


100 nm lines in ~145 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) with and without agitation at room temperature and at 5 degrees Celsius. Furthermore, same pattern ahs been developed with N50 (standard developer for ZEP520A).
[[File:ContrastCurvesCSAR.png|400px]]
[[File:w919sa-d.png|400px]]




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