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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 216: Line 216:
| 2500      <!-- coil power -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
| 35      <!-- platen power -->
! Old       <!-- Showerhead -->
! New       <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original | 1]]      <!-- link processes -->
|  <!-- keywords -->
|  <!-- keywords -->
Line 235: Line 235:
| 2500      <!-- coil power -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
| 35      <!-- platen power -->
! Old       <!-- Showerhead -->
! New       <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original | 1]]      <!-- link processes -->
|  <!-- keywords -->
|  <!-- keywords -->
Line 254: Line 254:
| 2500      <!-- coil power -->
| 2500      <!-- coil power -->
| 35      <!-- platen power -->
| 35      <!-- platen power -->
! Old       <!-- Showerhead -->
! New       <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessD/original | 1]]      <!-- link processes -->
|  <!-- keywords -->
|  <!-- keywords -->
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