Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
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! colspan="2"| Process | ! colspan="2"| Process | ||
! colspan="3"| Before | ! colspan="3"| Before (Old showerhead) | ||
! colspan="3"| After | ! colspan="3"| After (New showerhead) | ||
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! Name/Type | ! Name/Type | ||