|
|
| Line 1: |
Line 1: |
|
| |
| {| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
| |
| |+ '''Process runs'''
| |
| |-
| |
| ! rowspan="2" width="40"| Date
| |
| ! colspan="4" width="120"| Substrate Information
| |
| ! colspan="4" | Process Information
| |
| ! rowspan="2" width="500" |SEM Images
| |
| |-
| |
| ! width="30" | Wafer info
| |
| ! width="40" | Mask
| |
| ! width="40" | Material/ Exposed area
| |
| ! width="40" | Tool / Operator
| |
| ! width="40" | Conditioning
| |
| ! width="40" | Recipe
| |
| ! width="40" | Wafer ID
| |
| ! width="40" | Comments
| |
| |-
| |
| | 18/8-2014
| |
| | 4" Danchip QC Wafer
| |
| | 1.5 µm AZ resist, daq2 mask
| |
| | Si / 10 %
| |
| | Pegasus/jmli
| |
| | 10 minute TDESC clean, 10 minute PR strip post process
| |
| | danchip/QC/QCprocA, 55 cycles (11+44) or 10:05 minutes
| |
| | S004257
| |
| ! OLD showerhead
| |
| |
| |
| [[file:S004257-08.jpg|150px|frameless ]]
| |
| [[file:S004257-09.jpg|150px|frameless ]]
| |
| [[file:S004257-10.jpg|150px|frameless ]]
| |
| [[file:S004257-11.jpg|150px|frameless ]]
| |
| [[file:S004257-12.jpg|150px|frameless ]]
| |
| [[file:S004257-13.jpg|150px|frameless ]]
| |
| [[file:S004257-14.jpg|150px|frameless ]]
| |
| |-
| |
| |}
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
| |
|
|
| |
|
| Line 106: |
Line 59: |
| ! New showerhead | | ! New showerhead |
| | | | | |
| [[file:S004746-01.jpg|250px|frameless ]] | | [[file:S004746-01.jpg|150px|frameless ]] |
| [[file:S004746-02.jpg|250px|frameless ]] | | [[file:S004746-02.jpg|150px|frameless ]] |
| [[file:S004746-03.jpg|250px|frameless ]] | | [[file:S004746-03.jpg|150px|frameless ]] |
| [[file:S004746-04.jpg|250px|frameless ]] | | [[file:S004746-04.jpg|150px|frameless ]] |
| [[file:S004746-05.jpg|250px|frameless ]] | | [[file:S004746-05.jpg|150px|frameless ]] |
| [[file:S004746-06.jpg|250px|frameless ]] | | [[file:S004746-06.jpg|150px|frameless ]] |
| [[file:S004746-07.jpg|250px|frameless ]] | | [[file:S004746-07.jpg|150px|frameless ]] |
| |- | | |- |
|
| |
|
| |} | | |} |
