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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
Line 129: Line 129:
| 2800      <!-- coil power -->
| 2800      <!-- coil power -->
| 120>>140(1.5s) 45      <!-- platen power -->
| 120>>140(1.5s) 45      <!-- platen power -->
! rowspan="2" | Old       <!-- Showerhead -->
! rowspan="2" | New       <!-- Showerhead -->
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]]      <!-- link processes -->
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]]      <!-- link processes -->
| rowspan="2" |    <!-- keywords -->
| rowspan="2" |    <!-- keywords -->
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