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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,579 edits
Line 97: Line 97:
! Old      <!-- Showerhead -->
! Old      <!-- Showerhead -->
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]]      <!-- link processes -->
| rowspan="2" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/ProcessA | 1]]      <!-- link processes -->
|    <!-- keywords -->
| rowspan="2" |    <!-- keywords -->
|-
|-
! rowspan="7" | Process A    <!-- recipe name -->
! rowspan="7" | Process A    <!-- recipe name -->
Line 116: Line 116:
| 140(1.5s) 45      <!-- platen power -->
| 140(1.5s) 45      <!-- platen power -->
! Old      <!-- Showerhead -->
! Old      <!-- Showerhead -->
|    <!-- keywords -->
|-
|-
| Cpoly1      <!-- step -->
| Cpoly1      <!-- step -->
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