Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/Crystal Settings: Difference between revisions
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|colspan="6" style="text-align: center;" style="background: #efefef;" | '''Material parameters for calculating the tooling factor''' | |||
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!scope="row" |Material | |||
!Density | |||
!Z ratio | |||
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|TiO<sub>2</sub> | |||
|4.260 | |||
|0.400 | |||
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|SiO<sub>2</sub> | |||
|2.648 | |||
|1.000 | |||
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|Si | |||
|2.320 | |||
|0.712 | |||
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