Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
| Line 83: | Line 83: | ||
! Runs | ! Runs | ||
! width="100" | Key words | ! width="100" | Key words | ||
|- | |||
! Baseline <!-- recipe name --> | |||
| - <!-- step --> | |||
| 30 <!-- chiller temp --> | |||
! 2.3 <!-- dep time --> | |||
| 10 <!-- dep pressure --> | |||
| 50 <!-- C4F8 flow --> | |||
| 0 <!-- SF6 flow --> | |||
| 0 <!-- O2 flow --> | |||
| 600 <!-- coil power --> | |||
| 5.0 <!-- etch time --> | |||
| 10 <!-- etch pressure --> | |||
| 20 <!-- C4F8 flow --> | |||
| 60 <!-- SF6 flow --> | |||
| 5 <!-- O2 flow --> | |||
| 400 <!-- coil power --> | |||
| 40 <!-- platen power --> | |||
| - <!-- hardware setting --> | |||
| [[Main Page/Process Logs/jmli/Pegasus/poly/base-A | 1]] <!-- link processes --> | |||
| <!-- keywords --> | |||
|- | |- | ||
! - <!-- recipe name --> | ! - <!-- recipe name --> | ||
| Line 103: | Line 123: | ||
| <!-- link processes --> | | <!-- link processes --> | ||
| <!-- keywords --> | | <!-- keywords --> | ||
|- | |- | ||
! base-B <!-- recipe name --> | ! base-B <!-- recipe name --> | ||