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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
No edit summary
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= Comparison of continuous processes =
{| border="1" cellpadding="1" cellspacing="1" style="text-align:center;"
{| border="1" cellpadding="1" cellspacing="1" style="text-align:center;"
|+ '''Comparison of processes before and after the change of showerhead in December 2014'''
|-
|-
! colspan="2"| Process
! colspan="2"| Process
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= Comparison of switched processes =




{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
|+ '''Switched etch of 1.8 µm polysilicon on BOX patterned with DUV'''
|-
|-
! rowspan="2" width="100"| Recipe
! rowspan="2" width="100"| Recipe
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