Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
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| S004679 | | S004679 | ||
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| S004592 | | S004592 | ||
| Wafer edge | | Wafer edge | ||
| [[file:S004592 edge.jpg | | | [[file:S004592 edge.jpg |250px|frameless ]] | ||
| S004679 | | S004679 | ||
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Revision as of 10:08, 4 December 2014
| Process | Before | After | ||||
|---|---|---|---|---|---|---|
| Wafer ID | Comment | SEM images | Wafer ID | Comment | SEM images | |
| rebe g4-14 black silicon recipe | S004592 | Wafer centre | 
|
S004679 | Wafer centre | 
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| S004592 | Wafer edge | 
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S004679 | Wafer edge | 
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