Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

Revision as of 10:02, 4 December 2014

**Comparison of processes before and after the change of showerhead in December 2014**
Process	Before			After
Process	Wafer ID	Comment	SEM images	Wafer ID	Comment	SEM images
rebe g4-14 black silicon recipe	S004592	Centre wafer		S004592	Centre wafer

@@ Line 6: / Line 6: @@
 ! colspan="3"| After
 |-
-! Parameter change
 ! Wafer ID
+! Comment
 ! SEM images
+! Wafer ID
 ! Comment
-! Wafer ID
 ! SEM images
 |-
@@ Line 19: / Line 19: @@
 | S004592
 | Centre wafer
-| [[file:S004 centre.jpg |150px|frameless ]]
+| [[file:S004679 centre.jpg |150px|frameless ]]
 |}