Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

Revision as of 10:01, 4 December 2014

**Comparison of processes before and after the change of showerhead in December 2014**
Process	Before			After
Process	Parameter change	Wafer ID	SEM images	Comment	Wafer ID	SEM images
rebe g4-14 black silicon recipe	S004592	Centre wafer		S004592	Centre wafer	File:S004 centre.jpg

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 {| border="1" cellpadding="1" cellspacing="1" style="text-align:center;"
-|+ '''Process parameters'''
+|+ '''Comparison of processes before and after the change of showerhead in December 2014'''
 |-
 ! rowspan="2"| Process
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 ! Wafer ID
 ! SEM images
-! Parameter change
+! Comment
 ! Wafer ID
 ! SEM images
 |-
+! rowspan="2"| rebe g4-14 black silicon recipe
+| S004592
+| Centre wafer
+| [[file:S004592 centre.jpg |150px|frameless ]]
+| S004592
+| Centre wafer
+| [[file:S004 centre.jpg |150px|frameless ]]
 |}