Specific Process Knowledge/Direct Structure Definition: Difference between revisions
| Line 73: | Line 73: | ||
|Optical waveguides, fluidic systems (master for PDMS/soft lithography) | |Optical waveguides, fluidic systems (master for PDMS/soft lithography) | ||
|Photonic bandgap structures | |Photonic bandgap structures | ||
| | |?? | ||
|Fluidic devices, optical waveguides, surface modification. | |Fluidic devices, optical waveguides, surface modification. | ||
|Cutting Silicon and glass wafers in odd shapes, shim cutting, shim patterning, surface modification, hole drilling in glass/silicon etc. | |Cutting Silicon and glass wafers in odd shapes, shim cutting, shim patterning, surface modification, hole drilling in glass/silicon etc. | ||