Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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= Single wafer spin dryers = | = Single wafer spin dryers = | ||
Single wafer spin dryers is useful for drying wafers if you only have one or few wafers to dry. The rotation speed is typically | Single wafer spin dryers is useful for drying wafers if you only have one or few wafers to dry. The rotation speed is typically 45*60rpm for 30-45 sec. | ||
<gallery caption="Different places to dry your wafers" widths="300px" heights="225px" perrow="4"> | <gallery caption="Different places to dry your wafers" widths="300px" heights="225px" perrow="4"> | ||