Specific Process Knowledge/Wafer and sample drying: Difference between revisions

Revision as of 13:23, 17 November 2014 view source Kabi (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 1,142 edits →Critical point dryer ← Older edit		Revision as of 13:23, 17 November 2014 view source Kabi (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 1,142 edits →Ethanol fume dryer Newer edit →
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	If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the ethanol fume dryer. Ethanol is heated to 70°C and your wafers are placed in the fumes of Ethanol which will make the water to evaporate from the surface.		If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the ethanol fume dryer. Ethanol is heated to 70°C and your wafers are placed in the fumes of Ethanol which will make the water to evaporate from the surface.

	[[image:Ethanol fume dry1.jpg\|~~200x350px~~\|left\|thumb\|Ethanol fume dry is placed to the right of the spin dryer 1 in C-1]]		[[image:Ethanol fume dry1.jpg\|300x350px\|left\|thumb\|Ethanol fume dry is placed to the right of the spin dryer 1 in C-1]]