Specific Process Knowledge/Wafer and sample drying: Difference between revisions
No edit summary |
|||
| Line 163: | Line 163: | ||
If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the critical point dryer. | If your wafers are fragile or having thin membranes, cantilevers or suspended bridges that risk to stick or adhere to the surface it can be a good idea to dry your wafers in the critical point dryer. | ||
[[image:Spin_dryer_3.jpg| | [[image:Spin_dryer_3.jpg|300x350px|left|thumb|Critical point dryer is placed to the right of the spin dryer 3 in D-3]] | ||
<br clear="all" /> | <br clear="all" /> | ||