Specific Process Knowledge/Wafer and sample drying: Difference between revisions
No edit summary |
|||
| Line 126: | Line 126: | ||
= Spin dryers = | = Spin dryers = | ||
A tool used for drying wafers. | A tool used for drying wafers. | ||
| Line 146: | Line 145: | ||
[[image:spin-rinser-dryer-white.jpg|200x200px|right|thumb|Image(s) of the equipment(s)]] | [[image:spin-rinser-dryer-white.jpg|200x200px|right|thumb|Image(s) of the equipment(s)]] | ||
<br clear="all" /> | |||
= Single wafer spin dryers = | |||
blafkldfjldgjklsdfjgasjdf | |||
dsdfkljkljfæls | |||
jksdfjlk | |||
<br clear="all" /> | <br clear="all" /> | ||